UV-NIL / SmartNIL® Systems
EV Group provides a complete product line for UV-based nanoimprint lithography (UV-NIL), including different single-step imprinting systems, large-area imprinters as well as step-and-repeat systems for efficient master fabrication. Besides soft UV-NIL, EVG offers its proprietary SmartNIL technology with multiple-use polymer stamp technology. The efficient and robust SmartNIL process provides high pattern fidelity, highly uniform patterned layers and minimum residual layers, combined with easy scalability in wafer size and production volume. EVG´s SmartNIL redeems the long-term promise of nanoimprinting being a high-performance, low-cost and volume-capable manufacturing technology for mass production of micro- and nanoscale structures.
Choose your UV-NIL / SmartNIL® System
EVG®610
UV- Nanoimprint Lithography System
A universal R&D mask alignment system with UV-nanoimprint capability from small pieces up to 150 mm
EVG®620 NT
SmartNIL® UV Nanoimprint Lithography System
A universal mask alignment system with UV-nanoimprint capability featuring EVG´s proprietary SmartNIL® technology up to 100 mm
EVG®6200 NT
SmartNIL® UV Nanoimprint Lithography System
A universal mask alignment system with UV-nanoimprint capability featuring EVG´s proprietary SmartNIL® technology up to 150 mm.
EVG®720
Automated SmartNIL® UV Nanoimprint System
Automated full-field UV-nanoimprint solution up to 150 mm, featuring EVG´s proprietary SmartNIL® technology.
EVG®7200
Automated SmartNIL® UV Nanoimprint Lithography System
Automated full-field UV-nanoimprint solution up to 200 mm, featuring EVG´s proprietary SmartNIL® technology
EVG®7300
Automated SmartNIL® UV Nanoimprint Lithography System
Automated UV Nanoimprint solution up to 300 mm, featuring EVG´s proprietary SmartNIL® technology
EVG®7200 LA
Automated Large Area SmartNIL® UV Nanoimprint Lithography System
Unmatched conformal nanoimprint lithography over large area.
HERCULES® NIL
Fully Integrated SmartNIL® UV-NIL System
A fully integrated nanoimprint lithography solution for high-volume manufacturing, featuring EVG´s proprietary SmartNIL® imprinting technology.
EVG®770
Step-and-Repeat Nanoimprint Lithography System
Step-and-Repeat Nanoimprint Lithography for Efficient Master Fabrication.
IQ Aligner®
Automated UV Nanoimprint Lithography System
High-precision UV imprinting system for wafer-level lens molding and stacking.
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Questions?
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EVG Solutions for Nanoimprint Lithography Brochure
