The EVG7300 leverages EVG´s SmartNIL technology to enable mass manufacturing of micro- and nanostructures.
Capable of printing nanostructures as small as 40* nm over a large area with unmatched throughput and low cost of ownership, the EVG7300 supports the production of a variety of devices and applications, including optical devices for augmented/virtual reality (AR/VR) headsets, 3D sensors, bio-medical devices, nanophotonics and plasmonics.
EVG’s SmartNIL technology has also been improved and modularized for the EVG7300 system. Together with EVG´s material expertise it provides the most advanced nanoimprint capabilities on the market featuring conformal imprinting, fast curing times with high-power lamp and smooth stamp detachment.
*resolution dependent on process and template
Fully automated UV-NIL imprinting and low-force detachment
Up to 300 mm substrates
200 mm / 300 mm bridge-tool capability
Continuous mode operation
Single-step full-area imprint process
Volume manufacturing of structures down to 40* nm and smaller
Supports a wide range of structure sizes and shapes, including 3D