EV GroupProductsNanoimprint LithographyUV Nanoimprint Lithography / SmartNIL®

UV-NIL / SmartNIL® Systems

EV Group provides a complete product line for UV-based nanoimprint lithography (UV-NIL), including different single-step imprinting systems, large-area imprinters as well as step-and-repeat systems for efficient master fabrication. Besides soft UV-NIL, EVG offers its proprietary SmartNIL technology with multiple-use polymer stamp technology. The efficient and robust SmartNIL process provides high pattern fidelity, highly uniform patterned layers and minimum residual layers, combined with easy scalability in wafer size and production volume. EVG´s SmartNIL redeems the long-term promise of nanoimprinting being a high-performance, low-cost and volume-capable manufacturing technology for mass production of micro- and nanoscale structures.

Choose your UV-NIL / SmartNIL® System

EVG610

EVG®610

UV- Nanoimprint Lithography System

A universal R&D mask alignment system with UV-nanoimprint capability from small pieces up to 150 mm

EVG620NT

EVG®620 NT

SmartNIL® UV Nanoimprint Lithography System

A universal mask alignment system with UV-nanoimprint capability featuring EVG´s proprietary SmartNIL® technology up to 100 mm

EVG6200NT

EVG®6200 NT

SmartNIL® UV Nanoimprint Lithography System

A universal mask alignment system with UV-nanoimprint capability featuring EVG´s proprietary SmartNIL® technology up to 150 mm.

EVG720

EVG®720

Automated SmartNIL® UV Nanoimprint System

Automated full-field UV-nanoimprint solution up to 150 mm, featuring EVG´s proprietary SmartNIL® technology.

EVG7200

EVG®7200

Automated SmartNIL® UV Nanoimprint Lithography System

Automated full-field UV-nanoimprint solution up to 200 mm, featuring EVG´s proprietary SmartNIL® technology

EVG7200LA

EVG®7200 LA

Automated Large Area SmartNIL® UV Nanoimprint Lithography System

Unmatched conformal nanoimprint lithography over large area.

HERCULES NIL

HERCULES® NIL

Fully Integrated SmartNIL® UV-NIL System

A fully integrated nanoimprint lithography solution for high-volume manufacturing, featuring EVG´s proprietary SmartNIL® imprinting technology.

EVG770

EVG®770

Step-and-Repeat Nanoimprint Lithography System

Step-and-Repeat Nanoimprint Lithography for Efficient Master Fabrication.

IQ Aligner

IQ Aligner®

Automated UV Nanoimprint Lithography System

High-precision UV imprinting system for wafer-level lens molding and stacking.

Talk to our EVG product experts!

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