EV GroupUnternehmenNews und PresseEV Group erhält Lithographie-Auftra...

EV Group erhält Lithographie-Auftrag für More than Moore Anwendungen vom VTT Technical Research Centre

EVG120 Resist Processing System bietet dank neuer Equipment-Plattform verbesserte Performance, höheren Durchsatz und größere Zuverlässigkeit

EVG®120 Automated Resist Processing System

ST. FLORIAN, Austria, May 15, 2018 EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that it has received an order for its EVG®120 automated resist processing system from VTT Technical Research Centre of Finland (VTT). An existing customer of EVG's wafer bonding and alignment systems, VTT is among the first to place an order for the newest version of the EVG120 system, which has been enhanced to provide even greater reliability, throughput and process performance compared to the previous-generation platform. VTT will use the new EVG120 system to increase capacity for supporting parallel R&D projects involving new and different coating materials, as well as to enable new research applications in "More than Moore" technology areas such as MEMS, optoelectronics, photonics and compound semiconductors.

"Lithography plays a vital role in the production process for devices that power our digital society," stated Heini Saloniemi, manager, process engineering, at VTT. "After a thorough product evaluation of lithography coating systems, VTT selected the EVG120 in a competitive tender, with coating uniformity and repeatability of coating thickness among the key evaluation criteria. We look forward to receiving the new EVG120 system, which will enhance our lithography process capabilities and allow us to explore new avenues of research."

The EVG120 automated resist processing system provides reliable and high-quality coating and developing processes in a universal platform. Its versatility and flexibility, as well as its low cost of ownership, makes it an ideal system for research environments where many development projects may be running in parallel, while its high throughput rates enable its use in volume production.

The updated EVG120 platform maintains all industry-leading capabilities of the previous-generation platform, including: compact design for minimal footprint; customizable module configurations for spin and spray coating, developing, bake and chill; EVG's CoverSpin™ technology, which provides optimized coating uniformity of odd-shaped and square substrates; EVG's proprietary OmniSpray® technology for conformal coating of extreme topographies; and wafer-edge handling.

New features on the updated platform include:

  • Separation of wet processing modules to enable constant conditions chamber to chamber
  • Integrated chemistry cabinet for resist pumps and bottles (including support for high-viscosity resists), for improved process control and short dispense cycles
  • New robot handling system that provides the highest reliability and increased throughput
  • Optional humidity and temperature control for constant environmental conditions

"As the leading research institute in Finland, VTT has a strong global network of industry partners throughout the world to transform breakthrough research into new products and services in renewable energy, health care, smart industry and smart city, as well as beyond. EVG is working tirelessly to support our key customers such as VTT in these endeavors," stated Thomas Wagenleitner, product management director at EV Group. "As part of that effort, we have leveraged more than 20 years of experience in resist processing to drive continuous improvements to our industry benchmark EVG120 platform. This allows us to enable even greater levels of coating performance for our customers at a lower cost of ownership, which is critical for both production fabs and research labs at the cutting edge of technology like VTT."

More information about the EVG120 automated resist processing system can be found here.

About VTT Technical Research Centre of Finland

VTT Technical Research Centre of Finland Ltd is one of the leading research and technology organisations in Europe. VTT has a national mandate in Finland. We use our research and knowledge to provide expert services for our domestic and international customers and partners. We serve both private and public sectors. We have 75 years' experience supporting our clients' growth with top-level research and science-based results. We develop new smart technologies, profitable solutions and innovation services. We cooperate with our customers to produce technology for business and build success and well-being for the benefit of society. For more information about the VTT Technical Research Centre of Finland, please visit http://www.vttresearch.com/.

VTT Memsfab Ltd is a VTT subsidiary company providing low to medium-volume wafer processing services. We focus on MEMS, photonic components and other micro/nano-electronic devices.
Our manufacturing is typically based on established technology platforms co-developed with VTT Technical Research Centre of Finland. Our services allow you to quickly design and manufacture new components in the same fab, eliminating costly and risky tech-transfer projects. For more information on VTT Memsfab, please visit https://www.vttmemsfab.fi/.

About EV Group (EVG)

EV Group (EVG) is a leading supplier of equipment and process solutions for the manufacture of semiconductors, microelectromechanical systems (MEMS), compound semiconductors, power devices and nanotechnology devices. Key products include wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems. Founded in 1980, EV Group services and supports an elaborate network of global customers and partners all over the world. More information about EVG is available at www.EVGroup.com.


Clemens Schütte
Director, Marketing and Communications
EV Group
Tel: +43 7712 5311 0
E-mail: Marketing@EVGroup.com

David Moreno
Open Sky Communications
Tel: +1.415.519.3915
E-mail: dmoreno@openskypr.com

Download PDF