Protec MEMS Technology Orders Maskless Lithography System from EV Group for Advanced Memory Wafer Probe Card Manufacturing

ASAN-SI, Chungcheongnam-Do, South Korea, January 23, 2024—PROTEC MEMS Technology (PMT), one of the world’s leading suppliers of semiconductor wafer probe cards, has ordered a LITHOSCALE^® maskless exposure system from EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets. The LITHOSCALE system will be installed at PMT’s headquarters in Asan-si, Chungcheongnam-Do, South Korea, where it will be used in the production of next-generation MEMS-based probe cards for wafer-level testing of advanced NAND, DRAM and High Bandwidth Memory (HBM) devices.

“Fine-pitch probe card manufacturing involves many lithographic patterning steps, which can significantly drive up cost of ownership,” stated Dr. Yong-Ho Cho, CEO of PMT. “We can achieve significant cost savings, faster process development, and improved process performance, by switching from traditional lithography to EV Group’s LITHOSCALE maskless exposure product. We look forward to future collaborations with EVG leveraging LITHOSCALE and other process solutions for advanced probe card manufacturing.”

Incorporating EVG’s MLE™ (maskless exposure) technology, LITHOSCALE addresses lithography needs for markets and applications that require a high degree of flexibility or product variation. LITHOSCALE tackles legacy bottlenecks by combining powerful digital processing that enables real-time data transfer and immediate exposure, high structuring resolution and throughput scalability. It is ideally suited for rapid prototyping, providing fast turnaround and R&D cycle times.

MEMS manufacturing in particular poses challenges for lithography due to its complex product mixes, which drive up mask overhead costs. LITHOSCALE’s mask-free approach eliminates mask-related consumables, addressing the demand for low-cost-of-ownership patterning in wafer probe card manufacturing. In addition, LITHOSCALE’s high depth of focus and high resolution (sub-2-micron L/S) enables maskless patterning of dense redistribution layer (RDL) and via connections, which supports technology scaling for fine-pitch probe cards.

According to Young-Sik Yun, general manager of EV Group Korea, “Wafer-level testing with probe cards is an essential process for improving device production yields and reducing overall test cost per die. LITHOSCALE offers a unique combination of high resolution, high flexibility to handle many different product designs, and low cost of ownership, making it an ideal solution for manufacturing fine-pitch wafer probe cards. We are pleased to support PMT in their efforts to expand their product portfolio and shorten their development cycles.”

About EV Group (EVG)

EV Group (EVG) is a leading supplier of equipment and process solutions for the manufacture of semiconductors, microelectromechanical systems (MEMS), compound semiconductors, power devices and nanotechnology devices. Key products include wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems. Founded in 1980, EV Group services and supports an elaborate network of global customers and partners all over the world. More information about EVG is available at www.EVGroup.com.

About PROTEC MEMS Technology

PROTEC MEMS Technology Inc. (PMT), a manufacturer of semiconductor inspection devices, was founded in May 2004 as Microfriend Inc. and was enlisted on the KOSDAQ in December 2016. In March 2023, Microfriend Inc. changed its name to PROTEC MEMS Technology Inc. (PMT). PMT is a competitive leading manufacturer that is constantly growing with next-generation probe cards based on MEMS technology as its main business. MEMS probe cards, the main product of PMT, are a high-value consumable device that is used in the final inspection process for semiconductor wafer. MEMS probe cards are developed with PMT’s own MEMS technology and are currently manufactured with 12-inch level ceramic substrates for memory applications. PMT is a solutions provider not only for probe cards, but also diverse test products related to technology with MEMS applications.
For more information, please visit PMT’s homepage: www.pmt23.com.

PMT Contact:

Hwang-Jin Yeo 
General Director                                                                      
PROTEC MEMS Technology (PMT)                                          
Tel: +82-41-423-0222                                                                
Email: hjyeo@pmt23.com