EV Group製品情報リソグラフィ装置Integrated Lithography Track Systems

Integrated Lithography Track Systems

Lithography track systems complete the EVG lithography product family with a fully integrated production system and high grade of automation combining mask alignment and exposure with integrated pre- and post-processing. Based on a modular platform, the HERCULES lithography track system merges EVG’s established optical mask alignment technology with integrated cleaning, resist coating, baking and resist development modules. This turns the HERCULES platform into a “one stop shop”, where pre-processed wafers are loaded into the tool and fully structured processed wafers are returned.

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Lithography Track System

The EVG HERCULES is a high volume system platform integrating the entire lithography process flow in one equipment reducing process footprint and operator support

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