The EVG770 is a versatile platform for step-and-repeat nanoimprint lithography for efficient master fabrication or direct patterning of complex structures on substrates. This approach allows uniform replication of templates from small dies up to 50 mm x 50 mm over large areas up to 300 mm substrate sizes. In combination with diamond turning or direct writing methods, step-and-repeat imprinting is frequently used to efficiently fabricate masters required for wafer-level optics manufacturing or EVG’s SmartNIL process.
Key features of the EVG770 include precise alignment capabilities, full process control and the flexibility to address requirements of a wide variety of devices and applications.
Efficient master fabrication of microlenses for wafer-level optics down to nanostructures for SmartNIL®
Simple implementation of different kind of masters
Variable resist dispense modes
Live image during dispensing, imprinting and demolding
In-situ force control for imprint and demolding
Optional optical wedge error compensation
Optional automated cassette-to-cassette handling
Wafer diameter (substrate size in mm)
100 up to 300
≤ 50 (resolution dependent upon template and process)
High-power LED (i-line) > 100 mW/cm²
Top side microscope for live overlay alignment ≤ ± 500 nm and fine alignment ≤ ± 300 nm