MEMS Devices

MEMS (micro electro mechanical systems) are miniaturized 3D devices consisting of microelectronic components (integrated circuits) and micromechanical, optical, chemical, biochemical, or micro-optical components. MEMS technology is a rapidly emerging field with a high-growth rate. Motion sensors, micro mirrors, microphones, gyroscopes, and accelerometers are just a few types of the MEMS devices that are found in consumer applications such as cell phones, television sets, digital cameras, gaming consoles and laptops.

The company's key competencies in lithographic technology lie in the high-throughput contact and proximity exposure capabilities of its Mask Alignment Systems as well as in its highly integrated coating platform. All of EV Group's lithography equipment platforms are 300 mm ready, can be fully integrated into its HERCULES lithography track systems and are complemented by its metrology tools for top-to-bottomside alignment verification.
EV Group further extended its lead in the lithography space with the company's special resist coating technology OmniSpray® and, most recently, the revolutionary NanoSpray. Not only do these unique technologies allow for extremely conformal coatings over high-topography structures - for example, through-silicon-via (TSV) structures with an aspect ratio of 1:5 (W:H) - but, ultimately, they enable customers to realize significantly reduced fabrication costs.

Please see our related products Mask Alignment Systems, EVG®40NT and Resist Processing Systems


80µm SU-8 resist features with sidewall angles approaching 90°.
Courtesy of DALSA Corporation.