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EVG®150 Automated Resist Processing System

Designed to provide the widest range of process variations, the EVG150 series' modularity accepts spin and spray coating, developing, bake and chill modules to suit your individual production requirements.


HERCULES® Lithography Track System

The HERCULES® is a fully-integrated lithography track solution for wafers and substrates up to 300 mm, featuring EVG’s established optical mask alignment technology with integrated cleaning, resist coating, baking and resist development modules.


IQ Aligner® Automated UV Nanoimprint Lithography System

The IQ Aligner automated double-side UV-NIL system allows for micromolding and nanoimprinting processes with stamps and wafers from 150 mm to 300mm diameter.



EVG®540 Automated Wafer Bonding System

The EVG540 is an automated single-chamber production bonder designed for pilot line and manufacturing as well as R&D for high volume manufacturing in Wafer Level Packaging, 3D-Interconnect and MEMS applications.


EVG®560 Automated Wafer Bonding System

The EVG560 accepts up to four bond chambers with various bond chamber configuration options for all bonding processes and wafers up to 300 mm.


EVG®850 Automated Production Bonding System for SOI

The EVG850 is designed to fulfill a wide range of fusion wafer bonding applications, with main focus on SOI substrates manufacturing. The EVG850 is the only production bonding system built to operate in high throughput, high-yield environments.


EVG®850DB Automated Debonding System

The EVG850DB Automated Debonder is designed for automated debonding of device wafer from the carrier substrate.


EVG®850TB Automated Temporary Bonding System

The EVG850 bonds compound semiconductor wafers to sapphire, quartz or silicon carriers by use of dry film, spin-on adhesives, or wax.


GEMINI® Automated Production Wafer Bonding System

EV Group's GEMINI provides a fully automated and integrated platform for wafer-to-wafer alignment and wafer bonding.


GEMINI®FB Production Fusion Bonding System

EV Group's GEMINI®FB provides a fully automated and integrated platform for wafer-to-wafer alignment and wafer bonding.


SmartView®NT Bond Alignment System for Universal Alignment

For wafer-to-wafer alignment via alignment keys in bond interface.


EVG®40NT Automated Measurement System

EV Group offers systems for highly accurate destruction-free alignment accuracy measurements designed for all processes that involve double sided lithography.