EVG®850 DB

Automated Debonding System

Fully automated debonding, cleaning and unloading of thin wafers

Within the fully automated debonder, the processed temporary bonding wafer stack is separated and cleaned, with the fragile device wafer always supported throughout the whole tool. Supported debonding methods include UV laser, thermal and mechanical debonding. With all debonding methods, the device wafer is either supported through film frame mounting or through a thin wafer handler.

Features

  • Reliable handling of thinned, bowed and warped wafers with and without topography
  • Automated cleaning of debonded wafer
  • Recipe controlled system
  • Real time monitoring and recording of all relevant process parameters
  • Fully integrated SECS/GEM interface in automated tools
  • Bridge tool capability for different substrate sizes
  • Modular tool layout → throughput-optimized depending on specific process
EVG850 DB

Technical Data

Wafer diameter (substrate size)
Up to 300 mm
Up to 12“ film frame
Configuration
Debond module
Clean module
Film frame mounter
Options
ID reading
Various output formats
High topography wafer handling
Warped wafer handling

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