EVG®101 Large Area Coating System

For cost effective coating on large areas.


  • Max. square substrate width (edge length or diameter): 400 mm, larger sizes on request
  • Max. number of optional modules: 1 bake module, 1 chill module
  • Spray coating:
    Spray nozzle programmable parameters:  Dispense rate, nozzle movement speed, panel movement speed
    Adjustable distance between nozzle and panel
    Park position and dummy dispense
  • Max. hotplate temperature: 150 °C
  • Automation options:
    Resist pumps for spray coating:
    - Precise flow control 10µl/s up to 200µl/s for low viscosity resist