EVG®7200 LA SmartNIL-based Nanoimprint Lithography System

 

Large-Area UV Nanoimprint Lithography Solution:

EVG is the market-leading equipment supplier for nanoimprint lithography (NIL). EVG pioneered and mastered this non-conventional technology through many years of research, implementing it in volume production and on ever-increasing substrate sizes.
The EVG7200 Large-Area UV Nanoimprint System marks the technology’s next milestone as it allows imprinting on Gen 2 (370 mm x 470 mm) panel size substrates. The SmartNIL-based system is ideally suited to leverage nanotechnology for panel manufacturing. For applications like displays, biotechnology and photonic elements, which cannot be reduced in size, it is crucial to increase the substrate utilization efficiency by increasing the pattern area. NIL has proven to be the most cost-efficient way to enable fabrication of nano patterns on large areas as it is not limited by optical systems and can provide the best pattern fidelity for the smallest structures.
EVG’s proprietary SmartNIL technology is optimized by years of research, development and field experience to address nanopatterning requirements that cannot be supported by conventional lithography. SmartNIL provides superior conformal imprint results down to 40 nm utilizing a very robust and controllable tooling. With unique and proven equipment capabilities in conjunction with a high level of process expertise, EVG fulfills industry needs by driving nanoimprinting to the next level.

Benefits:

EVG®7200 LA SmartNIL®

  • Enables nanopatterning down to 40 nm on panel-size substrates
  • Robust and precisely controllable processing
  • Optimized high-power UV curing sequence for panel substrates
  • Fully automated imprinting and controlled low-force detachment for maximum working stamp reusability


Proprietary SmartNIL® nanoimprinting

  • Proprietary SmartNIL technology is a scalable and robust technology fulfilling industry needs
  • SmartNIL provides unmatched conformal imprinting over large areas
  • Volume-proven imprinting technology with superior replication fidelity
  • Uniform large-area imprint with high process flexibility
  • Multiple-use polymer stamp technology for longest master lifetime and significant cost savings