EVG®7200 Automated UV Nanoimprint Lithography System

 

UV Nanoimprint Solution for Nanopatterning:

The EVG7200 system leverages EVG's innovative SmartNIL technology and EVG's materials expertise to enable mass manufacturing of micro- and nanoscale structures. The system brings the advanced soft stamp and imprint capability of SmartNIL to larger substrates and smaller geometries, with resolution down to 40 nm* in volume production. This enables greater cost-of-ownership (CoO) benefits and realizes the full manufacturing potential of nanoimprint lithography.

EVG® 7200 automated UV Nanoimprint System Features:

  • Optimized for high throughput (40 wph*)
  • Integrated stamp manufacturing, which eliminates the need for stand-alone stamp replication systems and lowers cost of ownership
  • Integrated electrostatic discharge reduces particle contamination
  • Optical clearance leaves no visible vacuum lines in the active imprint area
  • Maintenance friendly operation with no additional tubing and plumbing required
  • Top and/or bottom side alignment
  • Integrated separation of stamp and substrate -> structure geometry independent
  • Large area imprint (up to 200 mm square)


*depending on process