太陽光電

Photovoltaics is a key technology within alternative energies. Solar cells enable generation of electricity for a wide range of applications: large scale utilities, commercial and residential roof top installations and various other on-grid and off-grid application. Improving the cell efficiency and reducing the manufacturing cost of solar cells will even increase this broad range of applications.

Optical lithography enables patterning of the solar cells with superior quality compared to standard patterning techniques. EV Group provides fully integrated systems for coating, exposure and development. Proximity exposure enables cell architectures with feature sizes <10 µm. The different mask levels are aligned to each other with an accuracy of  <1 µm.

Due to accurate control of line width and line edge roughness it is possible to create a fine grid of front contacts. This enables PV cell architectures with higher homogenity of current distribution while minimizing shading due to front contacts.