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纳米压印光刻系统《紫外光，

微接触压印光刻》

EV Group provides a complete product line for UV-based nanoimprint lithography including single step UV-imprinting systems and step and repeat large area UV-nanoimprinting systems.

EVG®620 Automated UV-NIL, µ-CP System

EVG®6200∞ Automated UV-NIL, µ-CP System

IQ Aligner® Automated UV-NIL, µ-CP System

EVG®770 Automated NIL Stepper

EVG®510HE Semi-automated Hot Embossing System

EVG®520HE Semi-automated Hot Embossing System

EVG®750 Automated Hot Embossing System

产品

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新闻和大事记

EV Group Launches Second-Generation EVG620HBL Mask Alignment System for LED Manufacturing

EV Group Signs Collaboration Agreement with Eulitha

更多新闻 ..

SEMICON Korea 2012

Strategies in Light 2012

更多大事记 ..

促销链接

EV Group Solutions Video for 3D ICs and TSVs

EV Group Corporate Video

EV Group Corporate Brochure

更多

EV Group Breaks through Resolution Barrier with Introduction of Soft UV Nanoimprint Lithography Technology

参考文献

Consortium for Commercialization of Nano Imprint Lithography (NIL)