The EVG620HBL is a dedicated, fully automated mask alignment system for high volume manufacturing of High-Brightness LEDs (HB-LEDs), compound semiconductors and power electronics. Based on the highly successful and field-proven EVG620, the HBL-version - in its second generation - is optimized for lowest cost-of-ownership and highest yield in LED and compound semiconductor manufacturing. Processing of up to 165 wafers per hour with highest alignment accuracy. Designed to handle bowed, warped and transparent substrates up to 150 mm, as being common in HB-LED, RF and power devices or surface acoustic wave filters. These features make the EVG620HBL the perfect solution for high volume manufacturing of HB-LEDs and compound semiconductors.
Features
Dedicated mask alignment system for HB-LEDs
Wafer sizes up to 150 mmUp to 220 wafers per hour in first print mode Up to 165 wafers per hour in automatic alignment modeSuperior automatic alignment for LED manufacturing, optimized for transparent and low contrast substratesRecipe controlled microscope illumination spectrum for best pattern contrast for patterned sapphire substrates (PSS) and roughened surfacesLine alignment capability which leverages the scribe line grid of sapphire wafers for alignment
Optimized for maximum productivity
Lowest Total Cost of OwnershipHighest Capital EfficiencyHighest Footprint Efficiency
Fully automated system for high volume manufacturing
High intensity UV-light source configuration for shortened process timeSimplified mask loading for minimal set-up timeLowest footprint - 1.7m3 - and minimized facility requirements for optimized cost of ownershipWafer cassette mapping and SECS II/GEM interface for optimum substrate traceability
EVG's field proven mask alignment technology
Minimum contact force for wafer wedge compensation and high yield processingTool conversion time for different substrate sizes: < 1 min
Total solution for HB-LEDs
Field-proven equipment for high volume manufacturingWorldwide process engineering supportWorldwide customer support