先进封装,三维层叠互联

Wafer level packaging employs specific alignment and wafer bonding techniques as an enabling solution for stacking of wafers and three-dimensional integration of devices.

Advanced packaging techniques such as wafer bumping, 3D Interconnect, and chip scale packaging allow different components of an integrated circuit (IC) to be stacked on each other and directly connected, rather than side by side on a printed circuit board. These new packaging methods enable the production of ICs with reduced cost, lower power consumption and higher performance.

Wafer bumping or three-dimensional stacking of wafers for wafer level packaging employs specific alignment and lithography. EVG's mask aligners offer full field proximity exposure and dark field alignment up to 300 mm. Wafer-to-wafer bond aligners support micron level face-to-face alignment for 3D interconnects.
Wafer level packaging techniques use wafer bonding as an enabling solution for stacking of wafers and three-dimensional integration of devices. EVG offers flexible wafer bonding systems with a unique bond chamber design to perform different wafer bonding processes. High vacuum or high pressure conditions can be applied to achieve a uniform and strong bond. Suitable for small diameter substrates up to 300 mm EVG's wafer bonding systems ensure the advancement of promising new packaging techniques.
Wafer stacking has become a viable solution to reduce actual die size for new IC packaging applications. The SmartView Aligner offers a proprietary method for micron level face-to-face wafer level alignment. This alignment technique is key to achieving the required accuracy in multiple wafer stacking for leading edge technologies. SmartView technology combined with the GEMINI wafer bonding systems allows stacking of wafers through face-to-face alignment and subsequent permanent bonding to form electrical or optical interconnects between wafers.