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IQ Aligner
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Heptagon Micro-optics Pte Ltd. adopts EV Group's IQ Aligner

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Questionnaire Mask Aligner

  • Please do not use any special characters (' * #) in form fields

    I am interested in a Mask Aligner.

    *First name:

    *Last name:

    *Company:

    *Department/Position:

    *Address:

    *City:

    State:

    *Zip Code:

    *Country:

    *e-Mail:

    *Phone:

    Fax:

    Internet:

    Application/Process:

     

    Equipment name

    EVG620

    EVG6200 Infinity

    IQ Aligner

     

    Wafer

    2"

    3"

    100 mm

    150 mm

    200 mm

    300 mm

    other

    Substrate

    100x100 mm

    150x150 mm

    200x200 mm

    other

    *Wafer/Substrate Material

    Silicon

    GaAs

    Quartz

    Ceramics

    Glass

    other

    Wafer/Substrate Thickness

    *Mask Size

    5"x5"

    7"x7"

    9"x9"

    13"x13"

    14"x14"

    other

    Mask Thickness

    Minimum Geometry

    *Alignment Method

    top side

    bottom side

    darkfield mask

    mask

    large gap

    *Degree of Automation

    Manual alignment

    Automatic alignment

    Manual loading

    Fully automatic handling

    Required Substrate Throughput (UPH)

    Exposure Modes

    Vacuum

    Proximity

    Hard contact

    Soft contact

    Current Printing Resolution

    Size/location of alignment keys

    Exposure wavelength

    Intensity requirements

    NUV (350 - 450 nm)

    DUV (< 350 nm)

    Required alignment accuracy

    <= 1µm

    <= 2µm

    ~ 5µm

    Lamphouse capability

    350W

    500W

    1000W

    5000W

    Photoresist types

    Photoresist thickness

     

    Critical Requirements

    Service response

    Maintenance contract

    Spare parts availability

    Quality

    Price

    Delivery

    Other Requirements

    Cleanroom classification

    Current Equipment

    Estimated time to acquire equipment

    1 - 6 months

    6 - 12 months

    1 - 2 years

     

    I would like to receive a quotation.

    I would like to be visited by an EVG sales manager.

    I would like to be contacted by EVG.

    Comments

     

    Fields marked with * must be filled out to work out your quotation

    Click here to send us the completed questionnaire!

    • Thank you!
       SEE ALSO:

    NanoAlign Technology


    LowTemp Plasma Bonding


    Advanced-chip-to-wafer Technology (AC2W)


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