나노임프린트 리소그라피

(UV-NIL, µCP, HE)

EV Group provides a complete product line for UV-based nanoimprint lithography including single step UV-imprinting systems and step and repeat large area UV-nanoimprinting systems.

EVG®620 Automated UV-NIL, µ-CP System

EVG®6200∞ Automated UV-NIL, µ-CP System

IQ Aligner® Automated UV-NIL, µ-CP System

EVG®770 Automated NIL Stepper

EVG®510HE Semi-automated Hot Embossing System

EVG®520HE Semi-automated Hot Embossing System

EVG®750 Automated Hot Embossing System

제품

제품검색

뉴스/이벤트

EVG and Dynaloy Jointly Develop Single-Wafer Cleaning Solution

Fraunhofer ISE Teams up with EVG to Enable Direct Semiconductor Wafer Bonds

뉴스 더보기...

Photonics Festival 2013

intersolar North America 2013

이벤트 더보기...

Nanotechnology

EV Group Breaks through Resolution Barrier with Introduction of Soft UV Nanoimprint Lithography Technology

기술 자료

Product Range

EV Group Corporate Video

3D InCites reports on EVG Headquarters expansion and technology developments

레퍼런스

Consortium for Commercialization of Nano Imprint Lithography (NIL)

나노임프린트 리소그라피 (UV-NIL, µCP, HE)

EVG®620 Automated UV-NIL, µ-CP System

EVG®6200∞ Automated UV-NIL, µ-CP System

IQ Aligner® Automated UV-NIL, µ-CP System

EVG®770 Automated NIL Stepper

EVG®510HE Semi-automated Hot Embossing System

EVG®520HE Semi-automated Hot Embossing System

EVG®750 Automated Hot Embossing System

제품

뉴스/이벤트

나노임프린트 리소그라피

(UV-NIL, µCP, HE)