For qualification of bond quality after pre-bonding, the EVG20 IR Inspection System gives first information on the bond quality via a stored image. A uniform illumination system and an IR sensitive CCD camera are the main components of the IR-inspection station. Video frame grabbing technology displays the camera image on the process monitor. The image of each wafer can be optionally stored on hard disk drive as graphic file.
- IR inspection station for quality control
- Automatic image acquisition of all bonded wafer pairs
- High sensitivity given by high resolution IR-CCD-camera