ナノテクノロジー

UV-NIL parallel nanoimprint of nano and microscale features. Courtesy of AMICA - Advanced Microelectronic Center Aachen.

UV-replication of micro optical elements on wafer-scale. Courtesy of Heptagon. 

Fusion bonded glass micro reactor. Courtesy of Micronit.

Sub-µm aligned features of a 5-layer photonic crystal in Si/SiO₂. Source EVG. 

Imprinted 50nm resolution pattern utilizing UV-NIL. Courtesy of Quantiscript Inc.

Micro-lens structures for CMOS image sensor modules created utilizing UV-NIL. Source EVG.