http://www.evgroup.com/feeds/products11EVG Products1http://www.evgroup.com/ja/products/lithography/mask_aligners/evg610maskalignment1/?version=1EVG610 is a R&D Mask Alignment System that can handle small substrate pieces and wafers up to 200 mm.7/12/2010 2:10:17 PMKinz LisaSection2http://www.evgroup.com/ja/products/bonding/waferbonding/evg560hbl/?version=1The EVG560 HBL is a dedicated, fully automated wafer bonding system for High-Brightness LED (HB-LED) manufacturing.7/12/2010 1:57:18 PMKinz LisaSection3http://www.evgroup.com/ja/products/bonding/temporary_bonding/?version=11/8/2010 7:28:58 AMKinz LisaSection4http://www.evgroup.com/ja/products/bonding/soi_bonding/evg320/?version=1The EVG320 Automated Single Wafer Cleaner is designed for efficient removal of particles prior to critical process steps in semiconductor processing.11/16/2009 9:39:13 AMHaslinger SiegfriedSection5http://www.evgroup.com/ja/products/lithography/nil_systems/?version=111/13/2009 10:50:17 AMReiter AnnaSection6http://www.evgroup.com/ja/products/lithography/nil_systems/iqaligneruvnil/?version=1The IQ Aligner automated double-side UV-NIL system allows for micromolding and nanoimprinting processes with stamps and wafers from 150 mm to 300mm diameter. 11/13/2009 10:47:59 AMReiter AnnaSection7http://www.evgroup.com/ja/products/lithography/mask_aligners/evg620semiauto/?version=1マスクアライナーは光学両面リソグラフィ用にデザインされており、R&Dから量産機までお客様のニーズに合わせた製品を取り揃えております。11/13/2009 10:43:29 AMReiter AnnaSection8http://www.evgroup.com/ja/products/bonding/integrated_bonding/?version=111/13/2009 10:15:35 AMReiter AnnaSection9http://www.evgroup.com/ja/products/bonding/waferbonding/?version=111/13/2009 10:07:57 AMReiter AnnaSection10http://www.evgroup.com/ja/products/bonding/?version=111/13/2009 9:46:27 AMReiter AnnaSection11http://www.evgroup.com/ja/products/bonding/integrated_bonding/geminifb/?version=1EV Group's GEMINIFB provides a fully automated and integrated platform for wafer-to-wafer alignment and wafer bonding.10/19/2009 12:18:06 PMAuinger Maria GerlindeSection12http://www.evgroup.com/ja/products/lithography/mask_aligners/?version=110/8/2009 3:49:22 PMAuinger Maria GerlindeSection13http://www.evgroup.com/ja/services/evg_application_lab/?version=110/7/2009 8:41:50 AMAuinger Maria GerlindeSection14http://www.evgroup.com/ja/products/lithography/inspection_systems/evg40/?version=1EV Group offers systems for highly accurate destruction-free alignment accuracy measurements designed for all processes that involve double sided lithography.9/30/2009 7:50:18 AMAuinger Maria GerlindeSection15http://www.evgroup.com/ja/products/bonding/bondalignment/smartviewnt/?version=1For wafer-to-wafer alignment via alignment keys in bond interface. 9/30/2009 7:43:38 AMAuinger Maria GerlindeSection16http://www.evgroup.com/ja/products/bonding/bondalignment/smartview/?version=1The SmartView Aligner offers a proprietary method for micron level face-to-face wafer level alignment.9/30/2009 7:42:57 AMAuinger Maria GerlindeSection17http://www.evgroup.com/ja/products/bonding/soi_bonding/evg850prod/?version=1The EVG850 is designed to fulfill a wide range of fusion wafer bonding applications, with main focus on SOI substrates manufacturing. The EVG850 is the only production bonding system built to operate in high throughput, high-yield environments.9/30/2009 7:38:27 AMAuinger Maria GerlindeSection18http://www.evgroup.com/ja/products/bonding/temporary_bonding/evg850autodebond/?version=1The EVG850DB Automated Debonder is designed for automated debonding of device wafer from the carrier substrate.9/1/2009 8:13:27 AMStieger ManuelaSection19http://www.evgroup.com/ja/products/bonding/temporary_bonding/evg850autotemp/?version=1The EVG850TB bonds compound semiconductor wafers to sapphire, quartz or silicon carriers by use of dry film, spin-on adhesives, or wax.9/1/2009 8:13:12 AMStieger ManuelaSection20http://www.evgroup.com/ja/products/lithography/nil_systems/evg6200_uv-nil/?version=1The EVG6200 Automated UV-NIL, µ-CP System is designed for For pattern creation in UV-curable materials from a prestructured stamp to a substrate.9/1/2009 8:02:51 AMStieger ManuelaSection