<?xml version="1.0" encoding="UTF-8"?><rss version="2.0"><channel><title>EVG Products</title><link>http://www.evgroup.com/feeds/products</link><description>EVG Products</description><item><id>1</id><title>Wafer Bonding Systems</title><link>http://www.evgroup.com/en/products/bonding/waferbonding/</link><description /><pubDate>3/5/2013 2:22:31 PM</pubDate><author>Kinz Lisa</author><type>Section</type></item><item><id>2</id><title>EVG® ZoneBOND® Process Modules</title><link>http://www.evgroup.com/en/products/bonding/temporary_bonding/zonebond/</link><description>The EVG805 is a semi-automated system for debonding thin wafers from sapphire, quartz or silicon carriers.</description><pubDate>1/17/2013 1:41:20 PM</pubDate><author>Doblmann Klaus</author><type>Section</type></item><item><id>3</id><title>&lt;p&gt;Temporary Bonding and &lt;/p&gt;
&lt;p&gt;Debonding Systems &lt;/p&gt;</title><link>http://www.evgroup.com/en/products/bonding/temporary_bonding/</link><description /><pubDate>11/20/2012 1:13:48 PM</pubDate><author>Doblmann Klaus</author><type>Section</type></item><item><id>4</id><title>EVG®520IS Semi-automated Wafer Bonding System</title><link>http://www.evgroup.com/en/products/bonding/waferbonding/evg520is/</link><description>The EVG520IS is configurable for all wafer bonding processes such as anodic, thermo compression, fusion bonding, or LowTemp™ plasma bonding.</description><pubDate>9/17/2012 11:22:42 AM</pubDate><author>Doblmann Klaus</author><type>Section</type></item><item><id>5</id><title>EVG®510 Semi-automated Wafer Bonding System</title><link>http://www.evgroup.com/en/products/bonding/waferbonding/evg510semi/</link><description>The EVG510 is configurable for all wafer bonding processes such as anodic, thermo compression, fusion bonding, or LowTemp™ plasma bonding.</description><pubDate>9/17/2012 11:22:11 AM</pubDate><author>Doblmann Klaus</author><type>Section</type></item><item><id>6</id><title>EVG®810LT LowTemp™ Plasma Activation System</title><link>http://www.evgroup.com/en/products/bonding/soi_bonding/evg810/</link><description>The EVG810LT LowTemp™ plasma activation system is a single chamber, stand-alone unit for SOI, MEMS, compound semiconductors and advanced substrate bonding.</description><pubDate>9/17/2012 11:13:20 AM</pubDate><author>Doblmann Klaus</author><type>Section</type></item><item><id>7</id><title>SOI Bonding Systems</title><link>http://www.evgroup.com/en/products/bonding/soi_bonding/</link><description /><pubDate>9/17/2012 11:12:19 AM</pubDate><author>Doblmann Klaus</author><type>Section</type></item><item><id>8</id><title>Process Technology</title><link>http://www.evgroup.com/en/services/evg_application_lab/</link><description /><pubDate>8/24/2012 9:34:05 AM</pubDate><author>Doblmann Klaus</author><type>Section</type></item><item><id>9</id><title>Bonding</title><link>http://www.evgroup.com/en/products/bonding/</link><description /><pubDate>7/23/2012 9:34:10 AM</pubDate><author>Doblmann Klaus</author><type>Section</type></item><item><id>10</id><title>EVG®620HBL Gen II Automated Mask Alignment System for LED</title><link>http://www.evgroup.com/en/products/lithography/mask_aligners/evg620hbl_gen2/</link><description>Dedicated, fully automated mask aligner system for high volume manufacturing of High-Brightness LEDs (HB-LEDs), compound semiconductors and power electronics.</description><pubDate>7/17/2012 7:06:47 AM</pubDate><author>Doblmann Klaus</author><type>Section</type></item><item><id>11</id><title>GEMINI® Automated Production Wafer Bonding System</title><link>http://www.evgroup.com/en/products/bonding/integrated_bonding/gemini/</link><description>EV Group's GEMINI provides a fully automated and integrated platform for wafer-to-wafer alignment and wafer bonding.</description><pubDate>7/11/2012 7:50:22 AM</pubDate><author>Kinz Lisa</author><type>Section</type></item><item><id>12</id><title>SmartView®NT Bond Alignment System for Universal Alignment</title><link>http://www.evgroup.com/en/products/bonding/bondalignment/smartviewnt/</link><description>For wafer-to-wafer alignment via alignment keys in bond interface. </description><pubDate>7/3/2012 12:21:21 PM</pubDate><author>Doblmann Klaus</author><type>Section</type></item><item><id>13</id><title>SmartView® Bond Alignment System for Universal Alignment</title><link>http://www.evgroup.com/en/products/bonding/bondalignment/smartview/</link><description>The SmartView Aligner offers a proprietary method for micron level face-to-face wafer level alignment.</description><pubDate>7/3/2012 12:21:05 PM</pubDate><author>Doblmann Klaus</author><type>Section</type></item><item><id>14</id><title>IQ Aligner® Automated UV-NIL, µ-CP System</title><link>http://www.evgroup.com/en/products/lithography/nil_systems/iqaligneruvnil/</link><description>The IQ Aligner Automated UV-NIL, µ-CP System allows for micromolding and nanoimprinting processes with stamps and wafers from 150 mm to 300mm diameter,</description><pubDate>3/27/2012 1:47:45 PM</pubDate><author>Kinz Lisa</author><type>Section</type></item><item><id>15</id><title>EVG®610 Semi-automated Bond Alignment System</title><link>http://www.evgroup.com/en/products/bonding/bondalignment/evg610/</link><description>The EVG610 Semi-automated Bond Alignment System is designed for wafer-to-wafer alignment for subsequent wafer bonding applications.</description><pubDate>3/23/2012 9:33:51 AM</pubDate><author>Steininger Judith</author><type>Section</type></item><item><id>16</id><title>EVG®301 Semi-automated Single Wafer Cleaning System</title><link>http://www.evgroup.com/en/products/bonding/soi_bonding/evg301/</link><description>The EVG300 series single wafer cleaning systems are designed for efficient removal of particles. In semiconductor processing, efficient cleaning and particles removal prior to critical process steps enables maximum yield.</description><pubDate>3/8/2012 7:44:28 AM</pubDate><author>Kinz Lisa</author><type>Section</type></item><item><id>17</id><title>XT Frame Platform</title><link>http://www.evgroup.com/en/products/bonding/temporary_bonding/xtframe/</link><description /><pubDate>2/21/2012 11:00:36 AM</pubDate><author>Steininger Judith</author><type>Section</type></item><item><id>18</id><title>Lithography</title><link>http://www.evgroup.com/en/products/lithography/</link><description /><pubDate>12/28/2011 4:50:14 PM</pubDate><author>Steininger Judith</author><type>Section</type></item><item><id>19</id><title>GEMINIFB® Production Fusion Bonding System</title><link>http://www.evgroup.com/en/products/bonding/integrated_bonding/geminifb/</link><description>EV Group's GEMINIFB provides a fully automated and integrated platform for wafer-to-wafer alignment and wafer bonding.</description><pubDate>10/11/2011 6:46:53 AM</pubDate><author>Kinz Lisa</author><type>Section</type></item><item><id>20</id><title>EVG®560HBL Automated Wafer Bonding System for HB-LED</title><link>http://www.evgroup.com/en/products/bonding/waferbonding/evg560hbl/</link><description>The EVG560 HBL is a dedicated, fully automated wafer bonding system for High-Brightness LED (HB-LED) manufacturing.</description><pubDate>7/6/2011 3:16:28 PM</pubDate><author>Steininger Judith</author><type>Section</type></item></channel></rss>