Dedicated, fully automated mask aligner system for high volume manufacturing of High-Brightness LEDs (HB-LEDs), compound semiconductors and power electronics.
EV Group Breaks Speed and Accuracy Barrier in Mask Alignment Lithography for Semiconductor Advanced Packaging
Imec and EVG demonstrate for the first time 1.8µm pitch overlay accuracy for wafer bonding
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EV Group Addresses Fast-Growing HB-LED Market with Launch of EVG620HBL Mask Alignment System
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