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BrochuresPlease click the picture to download the brochure in PDF formatEVG100 Series Short Brochure.pdfTechnical PapersPlease click the titles to download the full papers in PDF FormatInvestigating the use of spray-coating technology in MEMS applicationsAbstract: Fabricating the many different varieties of of microelectromechanical systems (MEMS) poses complex processing challenges, particularly in the lithography area. Since MEMS devices rely on mechanical elements, they incorporate three-dimensional microstructures....Microring resonators fabrication by BCB adhesive wafer bondingAbstract: Microring resonator devices are attractive for Wavelength Division Multiplexing (WDM) applications because of their inherent spectral characteristics. GaInAsP/InP microring resonator devices were fabricated using a vertical integration concept based on GaInAsP/InP-on-GaAs wafer-to-wafer bonding...Spray coating for MEMS, NEMS and Micro SystemsAbstract: In the semiconductor and MEMS industry there is a requirement for uniform resist layers over highly integrated device structures. To achieve a precise line width, it is required to develop a coating process in which there are no coating defects, high coating uniformity over structures, and little to no edge bead...
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