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Nanoimprint Lithography

Systems (UV-NIL, µCP, HE)

EV Group provides a complete product line for UV-based nanoimprint lithography including single step UV-imprinting systems and step and repeat large area UV-nanoimprinting systems.

EVG®620 Automated UV-NIL, µ-CP System

EVG®6200∞ Automated UV-NIL, µ-CP System

IQ Aligner® Automated UV-NIL, µ-CP System

EVG®770 Automated NIL Stepper

EVG®510HE Semi-automated Hot Embossing System

EVG®520HE Semi-Automated Hot Embossing System

EVG®750 Automated Hot Embossing System

Products

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News and Events

University of Michigan's Lurie Nanofabrication Facility selects EV Group Wafer Bonding Systems

NILCom Members Present Solutions and Services for Commercialization of Nanoimprint Lithography (NIL)

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Solutions for 3D Integration and TSV

EV Group Corporate Brochure

EV Group Product Range

See Also

Fraunhofer IOF selects EV Group UV-NIL System for Leading-Edge

Technical Papers

References

Consortium for Commercialization of Nano Imprint Lithography (NIL)