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  • Nanoimprint Lithography Systems (UV-NIL, µCP, HE)

Nanoimprint Lithography

Systems (UV-NIL, µCP, HE)

EV Group provides a complete product line for UV-based nanoimprint lithography including single step UV-imprinting systems and step and repeat large area UV-nanoimprinting systems.

EVG®620 Automated UV-NIL, µ-CP System

EVG®6200∞ Automated UV-NIL, µ-CP System

IQ Aligner® Automated UV-NIL, µ-CP System

EVG®770 Automated NIL Stepper

EVG®510HE Semi-automated Hot Embossing System

EVG®520HE Semi-Automated Hot Embossing System

EVG®750 Automated Hot Embossing System

Products

  • Lithography
    • Mask Alignment Systems
    • Resist Processing Systems
    • Lithography Track Systems
    • Nanoimprint Lithography Systems (UV-NIL, µCP, HE)
      • EVG®620
      • EVG®6200∞
      • IQ Aligner®
      • EVG®770
      • EVG®510HE
      • EVG®520HE
      • EVG®750
    • Inspection Systems
  • Bonding
  • Process Technology
Advanced Product Search

News and Events

EV Group Signs Collaboration Agreement with Eulitha

Asahi Kasei orders IQ Aligner UV-NIL system for advanced materials development for wafer-level optics

more news ..

Strategies in Light 2012

ICONN 2012

more events ..

Promotional Links

EV Group Solutions Video for 3D ICs and TSVs

EV Group Corporate Video

EV Group Corporate Brochure

Product Range

See Also

EV Group Breaks through Resolution Barrier with Introduction of Soft UV Nanoimprint Lithography Technology

Nanotechnology

Technical Papers

References


Consortium for Commercialization of Nano Imprint Lithography (NIL)

 
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