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Nanoimprint Lithography

Systems (UV-NIL, µCP)

EV Group provides a complete product line for UV-based nanoimprint lithography including single step UV-imprinting systems and step and repeat large area UV-nanoimprinting systems.

EVG®620 Semi-automated NIL System

EVG®6200∞ Semi-automated NIL System

IQ Aligner® UV-NIL

EVG®770 NIL Stepper

Products & Solutions

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News and Events

3M and EV Group settle patent infringement suit

EV Group introduces new suite of aligners and measurement systems

SEMICON Korea 2009

SEMICON China 2009

Promotional Links

Solutions for 3D Integration and TSV

EV Group Product Range

See Also

EV Group ships 100th Nanoimprint Lithography System

Technical Papers

References

Consortium for Commercialization of Nano Imprint Lithography (NIL)