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  • Nanoimprint Lithography Systems (UV-NIL, µCP, HE)

Nanoimprint Lithography

Systems (UV-NIL, µCP, HE)

EV Group provides a complete product line for UV-based nanoimprint lithography including single step UV-imprinting systems and step and repeat large area UV-nanoimprinting systems.

EVG®620 Automated UV-NIL, µ-CP System

EVG®6200∞ Automated UV-NIL, µ-CP System

IQ Aligner® Automated UV-NIL, µ-CP System

EVG®770 Automated NIL Stepper

EVG®510HE Semi-automated Hot Embossing System

EVG®520HE Semi-Automated Hot Embossing System

EVG®750 Automated Hot Embossing System

Products

  • Lithography
    • Mask Alignment Systems
    • Resist Processing Systems
    • Lithography Track Systems
    • Nanoimprint Lithography Systems (UV-NIL, µCP, HE)
      • EVG®620
      • EVG®6200∞
      • IQ Aligner®
      • EVG®770
      • EVG®510HE
      • EVG®520HE
      • EVG®750
    • Inspection Systems
  • Bonding
  • Process Technology
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News and Events

EV Group Capitalizes on MEMS Market Leadership, Further Diversifies Business

EV Group Introduces Industry's First Fully Automated Wafer Bonding System for HB-LED Manufacturing

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COMS 2010

NRW - Nano Conference 2010

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Promotional Links

Solutions for 3D Integration and TSV

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Product Range

See Also

Nanotechnology

Technical Papers

References


Consortium for Commercialization of Nano Imprint Lithography (NIL)

 
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