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  • Nanoimprint Lithography Systems (UV-NIL, µCP, HE)

Nanoimprint Lithography

Systems (UV-NIL, µCP, HE)

EV Group provides a complete product line for UV-based nanoimprint lithography including single step UV-imprinting systems and step and repeat large area UV-nanoimprinting systems.

EVG®620 Automated UV-NIL, µ-CP System

EVG®6200∞ Automated UV-NIL, µ-CP System

IQ Aligner® Automated UV-NIL, µ-CP System

EVG®770 Automated NIL Stepper

EVG®510HE Semi-automated Hot Embossing System

EVG®520HE Semi-Automated Hot Embossing System

EVG®750 Automated Hot Embossing System

Products

  • Lithography
    • Mask Alignment Systems
    • Resist Processing Systems
    • Lithography Track Systems
    • Nanoimprint Lithography Systems (UV-NIL, µCP, HE)
      • EVG®620
      • EVG®6200∞
      • IQ Aligner®
      • EVG®770
      • EVG®510HE
      • EVG®520HE
      • EVG®750
    • Inspection Systems
  • Bonding
  • Process Technology
Advanced Product Search

News and Events

EV Group Rolls Out Next-Generation EVG120 Automated Resist Processing System

EV Group Ships 300mm Wafer Bonding System to Leading Chinese Semiconductor Foundry

more news ..

ECTC 2013

sensors expo & conference 2013

more events ..

TBDB_AD_Feb_13
See Also

Nanotechnology

EV Group Breaks through Resolution Barrier with Introduction of Soft UV Nanoimprint Lithography Technology

Technical Papers

Product Range

EV Group Corporate Video

3D InCites reports on EVG Headquarters expansion and technology developments

References


Consortium for Commercialization of Nano Imprint Lithography (NIL)

 
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