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Inspection Systems

EV Group offers systems for highly accurate destruction-free alignment accuracy measurements designed for all processes that involve double sided lithography.

EVG®40 Top-to-bottom side Measurement System

EVG®40NT Measurement System

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  • Lithography
    • Mask Aligners
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    • Nanoimprint Lithography Systems (UV-NIL, µCP)
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      • EVG®40
      • EVG®40NT
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News and Events

3M and EV Group settle patent infringement suit

EV Group introduces new suite of aligners and measurement systems

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SEMICON Korea 2009

SEMICON China 2009

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Solutions for 3D Integration and TSV

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Solutions for 3D Integration and TSV

 
 
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