The EVG120 is an economical tool for quality spin coating and develop processes, especially for standard photoresist applications. Combined spin coating, developing, and bake and chill processes give the EVG120 its high flexibility and provide for advanced multi-functional process variations. The system layout allows the processing of an extensive range of materials and delivers quality results for MEMS processes. It can integrate up to two spin modules and is fully-automated with a robot handling system that achieves cost-efficient, high throughput.
Features
- Economical tool for quality spin coating and develop processes, especially for standard photoresist applications
- Fully integrated process modules
- Sophisticated field-proven wafer handling by robot
- Options:
- Bake modules for up to 250°C
- Water cooled chill modules
- Vapor prime modules