MEMS

Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology.


 

SCKorea_2015_logo_0
SEMICON Korea 2015
February 04 - 06, 2015, COEX, Seoul, Korea
Visit us at our booth # 1352 at SEMICON Korea 2015.

  
spie photonics west

SPIE Photonics West 2015
February 07 - 12, 2015, San Francisco, California, USA

Visit our presentation "CMOS compatible fabrication of 3D photonic crystals by nanoimprint lithography" at Session 6: MOEMS Components and Systems I at SPIE Photonics West OPTO.

 


  MECE-13 Material Form

MEMS Executive Congress Europe 2015
March 09 - 10, 2015, Copenhagen, Denmark

SEMICON China 2015

SEMICON China 2015
March 17 - 19, 2015, Shanghai New International Expo Centre

Visit our booth # 3519 in Hall W3 at SEMICON China 2015.