Micro-Electro-Mechanical Systems (MEMS) is the
integration of mechanical elements, sensors, actuators, and electronics on
a common silicon substrate through microfabrication
EV Group Breaks Speed and Accuracy Barrier in Mask Alignment Lithography for Semiconductor Advanced Packaging
Imec and EVG demonstrate for the first time 1.8µm pitch overlay accuracy for wafer bonding
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EV Group Capitalizes on MEMS Market Leadership, Further Diversifies Business
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