History

historysite-new-historywall-headings4

2010 

EVG560
  • Implementation and successful certification of an environmental management system according to ISO 14001.
  • Launch of the EVG560HBL, the industry´s first Fully Automated Wafer Bonding System for High Brightness LED Manufacturing.

 

2011

  EVG620HBL-gesamt2

  • Launch of the EVG620HBL Automated Mask Alignment System for HB-LED, delivering highest-in-class throughput and yield.

  EVG850SOI-450mm

  • Introduction of the industry´s first Wafer Bonding System for 450 mm SOI semiconductor wafers: EVG850SOI/450 mm.

  EVG_Spatenstich

  • EVG Headquarters Expansion to more than double the company´s production floor space in light of very strong order intake.
GeminiFB_EFEM


  • Launch of new flagship model with enhanced throughput and automation performance in the GEMINI FB family of Fusion Wafer Bonding Systems.
  • Launch of new XT Frame equipment platform to boost High-Volume Manufacturing performance.

2012

  EVG850TBDB XT Frame Produktbild
  • Launch of the EVG850TB/DB based on the XT Frame platform for High-Volume 3D-IC manufacturing.