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 Related Products

Lithographie

   

EVG®150 Automated Resist Processing System

Designed to provide the widest range of process variations, the EVG150 series' modularity accepts spin and spray coating, developing, bake and chill modules to suit your individual production requirements.

   

EVG®40NT Automated Measurement System

EV Group offers systems for highly accurate destruction-free alignment accuracy measurements designed for all processes that involve double sided lithography.

   

EVG®620 Automated Mask Alignment System

Mask Alignment System designed for optical double-side lithography. Volume production types and manual R&D systems are available.

   

EVG®620 Automated UV Nanoimprint Lithography System

The EVG620 Automated NIL System allows for imprint processes with stamps to substrates ranging from small chip size pieces up to 150 mm in diameter.

   

EVG®6200∞ Automated Mask Alignment System

With full field proximity exposure of very thick resist layers, the EVG6200 Infinity Automated Mask Alignment System targets wafer bumping and chip scale packaging markets as well as applications in MEMS, Compound Semiconductor, Power Devices and Nanotechnology.

   

EVG®6200∞ Automated UV Nanoimprint Lithography System

The EVG6200 Automated NIL System is designed for pattern creation in UV-curable materials from a prestructured stamp to a substrate.

   

EVG®6200NT Automated Mask Alignment System

Known for its high level of automation and reliability, the EVG®6200NT Automated Mask Alignment System is designed for wafer-to-wafer alignment up to 200 mm wafer sizes.

   

EVG®620NT Automated Mask Alignment System

Known for its high level of automation and reliability, the EVG®620NT Automated Mask Alignment System is designed for wafer-to-wafer alignment up to 150 mm wafer sizes.

   

Hercules® Lithography Track System

The Hercules is a unique platform with spin coat, bake, chill, align/expose and develop modules, all arranged in one production system.

   

IQ Aligner® Automated Mask Alignment System

The IQ Aligner Automated Mask Aligenment System is based on a field-proven, robust design with up to 300 mm wafer size capability, full-field exposure, single and double-side alignment, large gap and dark field mask alignment

   

IQ Aligner® Automated UV Nanoimprint Lithography System

The IQ Aligner automated double-side UV-NIL system allows for micromolding and nanoimprinting processes with stamps and wafers from 150 mm to 300mm diameter.

Bonding

   

EVG®510 Semi-automated Wafer Bonding System

The EVG510 Semi-automated Wafer Bonding System is configurable for all wafer bonding processes such as anodic, thermo compression, fusion bonding, or LowTemp™ plasma bonding.

   

EVG®520IS Semi-automated Wafer Bonding System

The EVG520IS Semi-automated Wafer Bonding System is configurable for all wafer bonding processes such as anodic, thermo compression, fusion bonding, or LowTemp™ plasma bonding.

   

EVG®540 Automated Wafer Bonding System

The EVG540 is an automated single-chamber production bonder designed for pilot line and manufacturing as well as R&D for high volume manufacturing in Wafer Level Packaging, 3D-Interconnect and MEMS applications.

   

EVG®560 Automated Wafer Bonding System

The EVG560 accepts up to four bond chambers with various bond chamber configuration options for all bonding processes and wafers up to 300 mm.

   

EVG®850DB Automated Debonding System

The EVG850DB Automated Debonder is designed for automated debonding of device wafer from the carrier substrate.

   

EVG®850TB Automated Temporary Bonding System

The EVG850 bonds compound semiconductor wafers to sapphire, quartz or silicon carriers by use of dry film, spin-on adhesives, or wax.

   

GEMINI® Automated Production Wafer Bonding System

EV Group's GEMINI provides a fully automated and integrated platform for wafer-to-wafer alignment and wafer bonding.

   

GEMINI®FB Production Fusion Bonding System

EV Group's GEMINI®FB provides a fully automated and integrated platform for wafer-to-wafer alignment and wafer bonding.

   

SmartView® Bond Alignment System for Universal Alignment

The SmartView Aligner offers a proprietary method for micron level face-to-face wafer level alignment

   

SmartView®NT Bond Alignment System for Universal Alignment

For wafer-to-wafer alignment via alignment keys in bond interface.