HERCULES® Lithography Track System

For fully automated and integrated coating, mask alignment, exposure and/or developing.

 

  • Max. wafer size: 300 mm
  • Max. square substrate size (edge length): 300 mm
  • Max. number of spin modules (coat/develop): 4
  • Max. number of further modules (hot plates, chill plates, vapor prime): 24
  • Spray coating:
    Spray nozzle programmable parameters: Speed (rpm), acceleration (rpm/s),
    absolute position
    Park position (nozzles sealed) and dummy dispense
  • Spin coating:
    Drive unit up to 10.000rpm, ramp-up speed up to 40.000 rpm/s
    Park position (nozzles sealed) and dummy dispense
  • Developing:
    Pressurized tank, flow control
    Nitrogen nozzle for atomizing developer in spray mode; also suitable for puddle
    and stream (rinse) develop
    Park position and dummy dispense
  • NanoSpray:
    For coating vias with Ø down to 20 µm and aspect ratios up to 1:4 and more;
    Sidewall angle can be vertical.
  • Max. hotplate temperature: 350 °C
  • Automation options:
    Resist pumps for spin coating:
    - For resist viscosities up to 52000cP
    - Up to 15ml dispense volume, up to 5ml/s dispense rate
    - Suckback programmable for best uniformity
    Resist pumps for spray coating:
    - Precise flow control 10µl/s up to 200µl/s for low viscosity resist