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  • Nanoimprint Lithographie Systeme (UV-NIL, µCP, HE)

Nanoimprint Lithographie

Systeme (UV-NIL, µCP, HE)

EV Group provides a complete product line for UV-based nanoimprint lithography including single step UV-imprinting systems and step and repeat large area UV-nanoimprinting systems.

EVG®620 Automated UV-NIL, µ-CP System

EVG®6200∞ Automated UV-NIL, µ-CP System

IQ Aligner® Automated UV-NIL, µ-CP System

EVG®770 Automated NIL Stepper

EVG®510HE Semi-automated Hot Embossing System

EVG®520HE Semi-automated Hot Embossing System

EVG®750 Automated Hot Embossing System

Produkte

  • Lithographie
    • Mask Alignment Systems
    • Resist Processing Systems
    • Lithography Track Systems
    • Nanoimprint Lithographie Systeme (UV-NIL, µCP, HE)
      • EVG®620
      • EVG®6200∞
      • IQ Aligner®
      • EVG®770
      • EVG®510HE
      • EVG®520HE
      • EVG®750
    • Inspektionssysteme
  • Bonding
  • Prozesstechnologie
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News und Events

EV Group Launches Second-Generation EVG620HBL Mask Alignment System for LED Manufacturing

EV Group Signs Collaboration Agreement with Eulitha

weitere News ..

SEMICON Korea 2012

Strategies in Light 2012

weitere Events ..

Promotional Links

EV Group Solutions Video for 3D ICs and TSVs

EV Group Corporate Video

EV Group HR Video

EV Group Corporate Brochure

Product Range

See Also

EV Group Breaks through Resolution Barrier with Introduction of Soft UV Nanoimprint Lithography Technology

Nanotechnologie

Technische Publikationen

References


Consortium for Commercialization of Nano Imprint Lithography (NIL)

 
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