EVG®510HE - Semi-automated Hot Embossing System

For hot embossing applications of polymer substrates and spin-on polymers with excellent pattern fidelity.

 

The EVG510HE Semi-automated Hot Embossing System is designed for embossing and nanoimprinting applications.  The hot embossing system is configured with a universal embossing chamber, high-vacuum and high-contact force capabilities and manages the whole range of polymers suitable for hot embossing. Together with high-aspect ratio embossing and multiple de-embossing options many processes for high quality pattern transfer and nm resolution are offered.

Features

  • For hot embossing applications of polymer substrates and spin-on polymers
  • Automated embossing process
  • EVG's proprietary separate alignment process for optically aligned embossing and imprinting
  • Fully software controlled process execution
  • Closed loop cooling water supply option
  • External de-embosssing and cooling station
  • UV-Nanoimprint option