MEMS (Mikro-Elektro-Mechanische-Systeme)
MEMS sind intelligente Mikrosysteme mit Sensorik, Datenverarbeitung
und/oder Aktorik.
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80µm SU-8 resist features with sidewall angles approaching
90°.
Courtesy of DALSA Corporation.
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MEMS Accelerometer.
Courtesy of ST Microelectronics.
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MEMS Gyroscope application.
Courtesy of Apple.
Sub-µm high-aspect ratio structures
created with DUV-Lithography.
Courtesy of CEETAM.
NanoSpray coating, 100µm diameter and 300µm depth. Source
EVG.
8-layer direct bond cross-section. Courtesy of MIT.
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MEMS Microphone.
Courtesy of Akustika.
Patterned, spray coated resist layer in anisotropically
etched cavity. Courtesy of TU-Delft DIMES.
High-Q-3D solenoid industors for RF ICs. Courtesy of SIMIT.
Glass-frit bond interface.
Courtesy of ST Microelectronics.
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