ST. FLORIAN, AUSTRIA / YOKOHAMA, JAPAN, March 17,
2009 – EV Group (EVG), a leading supplier of wafer bonding and
lithography equipment for the MEMS, nanotechnology and semiconductor
markets, today announced that they have received an order for its EVG101D,
a photoresist developer, from the University of Tokyo. A first-time order
win from the University, EVG’s tool will be installed at a super-clean room
(Class 1) in the Takeda Sentanchi Building at the University’s
facilities.
A versatile R&D system, the EVG101D augments an existing developer at
the University and will be used to develop 100-nm and smaller patterns on
masks and wafers up to 200 mm at the research facility. The patterns will
be created by e-beam lithography system from the VLSI Design and Education
Center (VDEC).
“This developer from EVG will allow us to reduce the amount of chemicals
required in the developing process, and provide an overall cost reduction
for us,” said Professor Yoshio Mita from the University of Tokyo.
“The EVG100 series is a flexible toolset that can be modified to serve as a
spray or spin coater, which is ideal for an R&D environment.
Additionally, this photoresist processing series is capable of coating
patterned wafers, which is suitable for MEMS production,” said Yuichi
Otsuka, Representative Director of EV Group Japan K.K.
The University of Tokyo has established an advanced research facility
dedicated to ultra-fine lithography/nanomeasurement. The sophisticated
center makes their leading-edge R&D tools for nanoprocessing and
nanomeasurement available to public and private companies as well as
government institution researchers. Since its establishment in 2007, these
entities have used the center’s high-throughput nanolithography and
nano-measurement systems, as well as its super resolution transmission
electron microscope and a variety of manufacturing systems atypical to
semiconductor device production. The facility also provides foundry and
analyses services, with university staff on-hand to support. For more
information, please visit: www.nanotechnet.t.u-tokyo.ac.jp
About the University of Tokyo
The University of Tokyo was established in 1877 as the first national
university in Japan. As a leading research university, the University of
Tokyo offers courses in essentially all academic disciplines at both
undergraduate and graduate levels and conducts research across the full
spectrum of academic activity. The university aims to provide its students
with a rich and varied academic environment that ensures opportunities for
both intellectual development and the acquisition of professional knowledge
and skills.
About EV Group
EV Group (EVG) is a world leader in wafer-processing solutions for
semiconductor, MEMS and nanotechnology applications. Through close
collaboration with its global customers, the company implements its
flexible manufacturing model to develop reliable, high-quality,
low-cost-of-ownership systems that are easily integrated into customers’
fab lines. Key products include wafer bonding, lithography/nanoimprint
lithography (NIL) and metrology equipment, as well as photoresist coaters,
cleaners and inspection systems.
In addition to its dominant share of the market for wafer bonders, EVG
holds a leading position in NIL and lithography for advanced packaging and
MEMS. Along these lines, the company co-founded the EMC-3D consortium in
2006 to create and help drive implementation of a cost-effective
through-silicon via (TSV) process for major ICs and MEMS/sensors. Other
target semiconductor-related markets include silicon-on-insulator (SOI),
compound semiconductor and silicon-based power-device solutions.
Founded in 1980, EVG is headquartered in St. Florian, Austria, and operates
via a global customer support network, with subsidiaries in Tempe, AZ;
Albany, NY; Yokohama and Fukuoka, Japan; Seoul, Korea and Chung-Li, Taiwan.
The company's unique Triple i-approach (invent - innovate - implement) is
supported by a vertical integration, allowing EVG to respond quickly to new
technology developments, apply the technology to manufacturing challenges
and expedite device manufacturing in high volume. More information is
available at www.EVGroup.com.
EV Group Contacts: Clemens Schütte
Director of Marketing & Communications
EV Group
Phone: +43 7712 5311 0
E-Mail: C.Schuette@EVGroup.com
Karen Do
Account Manager
MCA, Inc.
Tel: +1-650-968-8900, ext. 108
E-mail: kdo@mcapr.com