EV Group receives order for photoresist developer from the University of Tokyo

ST. FLORIAN, AUSTRIA / YOKOHAMA, JAPAN, March 17, 2009 – EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that they have received an order for its EVG101D, a photoresist developer, from the University of Tokyo. A first-time order win from the University, EVG’s tool will be installed at a super-clean room (Class 1) in the Takeda Sentanchi Building at the University’s facilities.

A versatile R&D system, the EVG101D augments an existing developer at the University and will be used to develop 100-nm and smaller patterns on masks and wafers up to 200 mm at the research facility. The patterns will be created by e-beam lithography system from the VLSI Design and Education Center (VDEC).

“This developer from EVG will allow us to reduce the amount of chemicals required in the developing process, and provide an overall cost reduction for us,” said Professor Yoshio Mita from the University of Tokyo.

“The EVG100 series is a flexible toolset that can be modified to serve as a spray or spin coater, which is ideal for an R&D environment. Additionally, this photoresist processing series is capable of coating patterned wafers, which is suitable for MEMS production,” said Yuichi Otsuka, Representative Director of EV Group Japan K.K.

The University of Tokyo has established an advanced research facility dedicated to ultra-fine lithography/nanomeasurement. The sophisticated center makes their leading-edge R&D tools for nanoprocessing and nanomeasurement available to public and private companies as well as government institution researchers. Since its establishment in 2007, these entities have used the center’s high-throughput nanolithography and nano-measurement systems, as well as its super resolution transmission electron microscope and a variety of manufacturing systems atypical to semiconductor device production. The facility also provides foundry and analyses services, with university staff on-hand to support. For more information, please visit: www.nanotechnet.t.u-tokyo.ac.jp


About the University of Tokyo
The University of Tokyo was established in 1877 as the first national university in Japan. As a leading research university, the University of Tokyo offers courses in essentially all academic disciplines at both undergraduate and graduate levels and conducts research across the full spectrum of academic activity. The university aims to provide its students with a rich and varied academic environment that ensures opportunities for both intellectual development and the acquisition of professional knowledge and skills.


About EV Group
EV Group (EVG) is a world leader in wafer-processing solutions for semiconductor, MEMS and nanotechnology applications. Through close collaboration with its global customers, the company implements its flexible manufacturing model to develop reliable, high-quality, low-cost-of-ownership systems that are easily integrated into customers’ fab lines. Key products include wafer bonding, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems.

In addition to its dominant share of the market for wafer bonders, EVG holds a leading position in NIL and lithography for advanced packaging and MEMS. Along these lines, the company co-founded the EMC-3D consortium in 2006 to create and help drive implementation of a cost-effective through-silicon via (TSV) process for major ICs and MEMS/sensors. Other target semiconductor-related markets include silicon-on-insulator (SOI), compound semiconductor and silicon-based power-device solutions.

Founded in 1980, EVG is headquartered in St. Florian, Austria, and operates via a global customer support network, with subsidiaries in Tempe, AZ; Albany, NY; Yokohama and Fukuoka, Japan; Seoul, Korea and Chung-Li, Taiwan. The company's unique Triple i-approach (invent - innovate - implement) is supported by a vertical integration, allowing EVG to respond quickly to new technology developments, apply the technology to manufacturing challenges and expedite device manufacturing in high volume. More information is available at www.EVGroup.com.

EV Group Contacts: Clemens Schütte
Director of Marketing & Communications
EV Group
Phone: +43 7712 5311 0
E-Mail: C.Schuette@EVGroup.com

Karen Do
Account Manager
MCA, Inc.
Tel: +1-650-968-8900, ext. 108
E-mail: kdo@mcapr.com

 

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