ST. FLORIAN, Austria, Oct. 6, 2008-EV Group (EVG), a
leading supplier of wafer bonding and lithography equipment for the MEMS,
nanotechnology and semiconductor markets, today announced that three
European universities-Southampton University, University of Ulster and
Technische Universitat Braunschweig-have placed orders for multiple EVG
systems. These follow-on order wins for leading-edge MEMS research
are for next-generation EVG systems, totaling in excess of US$2.9 million.
Notably, the UK-based Southampton University purchased the largest
photolithography/MEMS equipment order by a university in the UK for The
Southampton Nanofabrication Centre-its new state-of-the art cleanroom set
to open this fall-equipping the organization with the most comprehensive
manufacturing capability in the MEMS field of any UK educational
institution. Tools purchased include several of EVG's most versatile
systems for photolithography and MEMS manufacturing ideal for a research
environment: the 150 coater with spin and spray coat capability; the 6200TR
automatic topside microscope aligner; the 620T microscope aligner for
training students in aligner techniques and processes; the 620TB manual
load top and bottom-side microscope aligner for MEMS applications, such as
creating microchannels by photo techniques and aligning wafers prior to
bonding; and the 501 bonder for laminating dry film on to substrates prior
to processing and wafer bonding. Shipment and installation of the
tools will take place upon the completion of the clean room construction
scheduled for this fall.
The University of Ulster and the Institute for Microtechnology at
Technische Universitat Braunschweig each purchased an EVG620T-a manual load
topside microscope aligner-for their respective MEMS R&D efforts.
The EVG620 is EV Group's leading precision mask and bond aligner system
from its EVG600 series. This versatile system is highly flexible
enabling users to scale from R&D to high-volume production, and to
adjust the tool for various application requirements. Both systems
have been shipped and installed.
"These universities are engaging in leading-edge MEMS research efforts, and
to be a part of enabling continued innovation in this field is very
exciting for EVG," said Paul Lindner, executive technology director of EV
Group. "The potential for knowledge transfer from R&D to
high-volume production is tremendous, which fuels EVG's own ongoing
commitment to R&D, so that we continue to deliver the most versatile
and flexible solutions needed to perpetuate the cycle of innovation."
About EV Group
EV Group (EVG) is a world leader in wafer-processing solutions for
semiconductor, MEMS and nanotechnology applications. Through close
collaboration with its global customers, the company implements its
flexible manufacturing model to develop reliable, high-quality,
low-cost-of-ownership systems that are easily integrated into customers'
fab lines. Key products include wafer bonding,
lithography/nanoimprint lithography (NIL) and metrology equipment, as well
as photoresist coaters, cleaners and inspection systems.
In addition to its dominant share of the market for wafer bonders, EVG
holds a leading position in NIL and lithography for advanced packaging and
MEMS. Along these lines, the company co-founded the EMC-3D consortium
in 2006 to create and help drive implementation of a cost-effective
through-silicon via (TSV) process for major ICs and MEMS/sensors.
Other target semiconductor-related markets include silicon-on-insulator
(SOI), compound semiconductor and silicon-based power-device solutions.
Founded in 1980, EVG is headquartered in St. Florian, Austria, and operates
via a global customer support network, with subsidiaries in Tempe, AZ;
Albany, NY; Yokohama and Fukuoka, Japan; Seoul, Korea and Chung-Li,
Taiwan. The company's unique Triple i-approach (invent - innovate -
implement) is supported by a vertical integration, allowing EVG to respond
quickly to new technology developments, apply the technology to
manufacturing challenges and expedite device manufacturing in high
volume. More information is available at www.EVGroup.com.
Tel: +43 7712 5311 0
Tel: +1-650-968-8900, ext. 119