发展史
1980 Founding of EV Group by the owner Erich Thallner and his wife Aya Maria Thallner 1985 EV Group created the world´s first double side mask aligner with bottom side microscope 1990 Invention of the process separation between wafer alignment and wafer bonding 1992 First production wafer bonding systems for volume MEMS production were provided, based on the process separation between wafer alignment and wafer bonding 1994 Founding of EV Group in Phoenix, USA Installation of the first automated SOI wafer bonder 1997 Headquarters building expansion Founding of EV Group in Yokohama, Japan Development of the first nanoimprinting system 1998 Development of the OmniSpray® cavity coating technology 1999 Introduction of the SmartView® wafer-to-wafer alignment system 2000 Founding of EV Group in Cranston, USA Headquarters building and manufacturing floor expansion Integrated production systems Gemini® and Hercules® were introduced First hot embossing system for BioMEMS and microfluidics applications shipped Celebration of the 20-year anniversary event 2001 70% headquarters building and manufacturing floor expansion Installation of the first 300 mm automated SOI production bonder Introduction of the first temporary bonding and debonding systems EV Group entered the Chinese market with two sales representations 2002 The new 300 mm automated IQ Aligner® was introduced First 300 mm production wafer bonding system and 300 mm SmartView® wafer-to-wafer bond aligner Several further 300 mm tool sets 2003 Founding of EVG-Jointech in Taiwan (Chung-Li) SmartEdge® wafer edge inspection system was introduced EV Group announced LowTemp plasma bonding 2004 Introduced Chip-to-Wafer bonding system, EVG®6200 Infinity mask aligner and EVG®570PMI nanoimprint lithography system for data storage applications 2005 Launch of new EVG520IS Wafer Bonding System Relocation and opening of new EVG North America Headquarters Celebration of 25th Company Anniversary 2006 Development of new Nano Spray Coating Technology Introduction of EVG´s online shop: www.EVGTshop.com 2007 Manufacturing Systems for Hot Embossing Manufacturing Systems for double-side UV-NIL Coating systems for flexible organic displays |
